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MEMS Devices
The ATC has a comprehensive capability in MEMS from concept through detailed design to fabrication and evaluation.
Micro and Nano Technology (MNT) offers entirely new methods of manufacture for sensors, actuators and displays which are more cost effective than conventionally engineered devices.
We offer a comprehensive capability in MEMS (Micro-Electro-Mechanical Systems) from concept through detailed design to fabrication and evaluation. Having been involved with MEMS technology since 1982, we have developed devices that are recognised as world leading, these include the BAE Systems Silicon Gyro which has been successfully transferred to a high volume manufacturing line delivering several million devices per annum into the automotive industry.
We have developed devices covering display, inertial, optical, Radio Frequency (RF), aerodynamic, biological, chemical and electromagnetic functionality. MEMS fabrication experts work alongside specialists in other engineering areas to form optimised project teams that can work with customers to give the best technological solution and value.
Open Access MEMS Laboratories
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Design & Fabrication laboratories to help develop Nano & Micro-Engineering Mechanical (MEMS) techniques
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Device experience in mixed silicon, glass, polymers and integrated PZT and integrated analogue/digital electronics
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Specialist facilities for modelling, photolithography, wafer bonding, deposition, etching, device packaging & metrology
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Non-Destructive Testing (NDT) includes:
- X-ray Photoelectron Spectroscopy for surface analysis
- Auger Electron Spectroscopy for chemical composition
- Fourier Transform Infra-Red for molecular id of contamination
- Atomic Force Microscope topo, material phase and thermal analysis
- Scanning Electron Microscopes for composition analysis
